トップ›研究者を探す›三次元微細単結晶シリコンプローブを集積化した高機能スマートセンシングチップ

三次元微細単結晶シリコンプローブを集積化した高機能スマートセンシングチップ

KAKEN 科学研究費助成事業データベース で見る
研究課題番号 KAKENHI-PROJECT-17206038
研究種目 基盤研究(A)
研究分野 理工系
工学
電気電子工学
電子デバイス・電子機器
研究機関 豊橋技術科学大学
代表研究者 石田 誠
研究分担者 澤田 和明
研究分担者 高尾 英邦
研究分担者 川島 貴弘
研究期間 開始年月日 2005/4/1
研究期間 終了年度 2007
研究ステータス 完了 (2007/4/1)
配分額（合計） 50,180,000 (直接経費 :38,600,000、間接経費 :11,580,000)
配分額（履歴） 2007年度：11,180,000 (直接経費 :8,600,000、間接経費 :2,580,000)
2006年度：12,870,000 (直接経費 :9,900,000、間接経費 :2,970,000)
2005年度：26,130,000 (直接経費 :20,100,000、間接経費 :6,030,000)
キーワード スマートセンシングチップ
三次元微細針電極
単結晶シリコンプローブアレイ
VLS選択成長
生体細胞電位計測
脳神経科学
MOSFET on Si(111)
マイクロ・ナノテクノロジー
スマートセンシンダチップ
Smart sensing chip
3-dimensional microprobe
Epitaxial silicon probe array
Selective Vapor-liquid-solid growth
Electrical recording of neurons
Neuroscience
MOSFET on Si (111) substrate
Micro
nanotechnology

研究成果

[雑誌論文] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFET by Selective Vapor-Liquid-Solid Growth

K.Takei, T.Kawashima, T.Kawano H.Takao, K.Sawada, and M.Ishida 2008

[雑誌論文] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFETs by Selective Vapor-Liquid-Solid Growth

K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, and M. Ishida 2008

[雑誌論文] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFETs by Selective Vapor-Liquid-Solid Growth

K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, M. Ishida 2008

[雑誌論文] Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-step VLS Growth

A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2007

[学会発表] Ishida, Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2007

[雑誌論文] Silicon Smart Microchip for Intelligent Human Sensing

M. Ishida, H. Takao, T. Kawashima, D. Akai, T. Noda, J. W. Kim, K. Takei, T. Kawano, and K. Sawada 2007

[学会発表] Development of Micro- and Submicro- Tube Array

K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, M. Ishida 2007

[雑誌論文] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

J. W. Kim, H. Takao, K. Sawada, and M. Ishida 2007

[雑誌論文] High-yield growth of p-Si microprobe arrays by selective vapo卜liquid-solid method using in situ doping and their properties

A.Ikedo, N.Funagayama, T.Kawashima, H.Takao, K.Sawada, and M.Ishida 2007

[雑誌論文] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

J.W. Kim, H. Takao, K. Sawada, M. Ishida 2007

[雑誌論文] Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circuits for Neural Interface Devices

K.Takei, T.Kawashima, H.Takao, K.Sawada, and M.Ishida 2007

[学会発表] Silicon Smart Microchip for Intelligent Human Sensing

M. Ishida, H. Takao, T. Kawashima, D. Akai, T. Noda, J.W. Kim, K. Takei, T. Kawano, K. Sawada 2007

[学会発表] High-yield growth of p-Si microprobe arrays by selective vapor-liquid-solid method using in situ doping and their properties

A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2007

[雑誌論文] Development of Micro- and Submicro- Tube Array

K.Takei, T.Kawashima, T.Kawano H.Takao, K.Sawada, and M.Ishida 2007

[雑誌論文] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

J.W.Kim, H.Takao, K.Sawada, and M.Ishida 2007

[雑誌論文] Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs

K.Takei, T.Kawashima, H.Takao, K.Sawada, and M.Ishida 2007

[雑誌論文] Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circnits for Neural Interface Devices

K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2007

[雑誌論文] Development of Micro- and Submicro- Tube Array

K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, and M. Ishida 2007

[学会発表] Fabrication of Si Probe and SiO2 Tube Array Chip Integrated with On-chip Circuits for Neural Interface Devices

K. Takei, T. Kawashima, H. Takao, K Sawada, M. Ishida 2007

[雑誌論文] Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs

K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2007

[学会発表] Ishida, Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs

K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2007

[雑誌論文] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability

J.W.Kim, H.Takao, K.Sawada, M.Ishida 2006

[雑誌論文] Experiment of liquid injection through SiO_2 micro tube array

K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2006

[雑誌論文] Re-growth of Si probe using VLS method for 3-dimensional Si microprobe array

N.Funagayama, T.Kawashima, H.Takao, K.Sawada, M.Ishida 2006

[雑誌論文] A very-fine Si microprobe array aimed for in-vivo recording of neuronal activities

T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida 2006

[雑誌論文] Fabrication of Si microprobe array for neural recording using Parylene film

A.Shinoda, T.Kawashima, H.Takao, K.Sawada, M.Ishida 2006

[学会発表] Experiment of liquid injection through SiO_2 micro tube array

K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2006

[雑誌論文] Re-growth of Si probe using VLS method for 3-dimensional Si microprobe array

N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2006

[雑誌論文] Micro Si-probe array for 3D recording of neural activities

A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2006

[雑誌論文] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111)by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing

Y. Kato, H. Takao, K. Sawada, and M. Ishida 2006

[雑誌論文] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing

Y. Kato, H. Takao, K. Sawada, M.Ishida 2006

[雑誌論文] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability

J. W. Kim, H. Takao, K. Sawada, M. Ishida 2006

[学会発表] A very-fine Si microprobe array aimed for in-vive recording of ne uronal activities

T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida 2006

[学会発表] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability

J.W. Kim, H. Takao, K, Sawada, M. Ishida 2006

[雑誌論文] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Flourline Implantation and Long-Time Hydrogen Annealing

Y.Kato, H.Takao, K.Sawada, M.Ishida 2006

[雑誌論文] Micro Si-probe array for 3D recording of neural activities

A.Ikedo, N.Funagayama, T.Kawashima, H.Takao, K.Sawada, M.Ishida 2006

[学会発表] Re-growth of Si probe using VLS method for s-dimensional Si microprobe array

N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2006

[雑誌論文] Fabrication of Si microprobe array for neural recording using Parylene film

A. Shinoda, T. Kawashima, H. Takao, K. Sawada, and M. Ishida 2006

[学会発表] Fabrication of Si microprobe array for neural recording using Parylene film

A. Shinoda, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2006

[学会発表] Micro Si-probe array for 3D recording of neural activities

A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida 2006

[雑誌論文] A very-fine Si microprobe array aimed for in-vivo recording of neuronal activities

T.Kawashima, T.Kawano, H.Takao, K.Sawada, H.Kaneko, M.Ishida 2006

[学会発表] Multich annel Si Microprobe Array for Neural Recording on Integrated Circuit

N. Funagayama, T. Kawano, H. Takao, K. Sawada, M. Ishida 2005

[雑誌論文] Multichannel Si Microprobe Array for Neural Recording on Integrated Circuit

N.Funagayama, T.Kawano, H.Takao, K.Sawada, M.Ishida 2005

[雑誌論文] Improvement of Electrical Properties of Si-Microprobe Electrode Arrays for Neural Recording

N.Funagayama, T.Kawano, T.Harimoto, A.Ishihara, T.Kawashima, H.Takao, K.Sawada, S.Usui, M.Ishida 2005

[雑誌論文] Neural recording with low-invasive Si microprobe array

T. Kawano, A. Ishihara, T. Harimoto, T. Kawashima, H. Takao, K. Sawada, S. Usui, and M. Ishida 2005

[雑誌論文] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities

T. Kawano, A. Ishihara, T. Harimoto, H. Takao, K. Sawada, S. Usui, and M. Ishida 2005

[学会発表] Neural recording with low-invasive Si microprobe array

T. Kawano, A. Ishihara, T. Harimoto, T. Kawashima, H. Takao, K. Sawada, S. Usui, M. Ishida 2005

[雑誌論文] Neural recording with low-invasive Si microprobe array

T.Kawano, A.Ishihara, T.Harimoto, T.Kawashima, H.Takao, K.Sawada, S.Usui, M.Ishida 2005

[雑誌論文] Improvement of Electrical Properties of Si-Microprobe Electrode Arrays for Neural Recording

N. Funagayama, T. Kawano, T. Harimoto, A. Ishihara, T. Kawashima, H. Takao, K. Sawada, S. Usui, and M. Ishida 2005

[雑誌論文] Multichannel Si Microprobe Array for Neural Recording on Integrated Circuit

N. Funagayama, T. Kawano, H. Takao, K. Sawada, M. Ishida 2005

[学会発表] Recording of single motor unit action potentials using Si micr oprobe electrode array chip - examination of electrode impedance

T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida 2005

[雑誌論文] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities

T.Kawano, A.Ishihara, T.Harimoto, H.Takao, K.Sawada, S.Usui, M.Ishida 2005

[雑誌論文] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method

Md.Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2005

[雑誌論文] Recording of single motor unit action potentials using Si microprobe electrode array chip - examination of electrode impedance -

T.Kawashima, T.Kawano, H.Takao, K.Sawada, H.Kaneko, M.Ishida 2005

[雑誌論文] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid(VLS)Growth Method

Md. S. Islam, H. Ishino, T. Kawano, H. Takao, K. Sawada, and M. Ishida 2005

[学会発表] Improvement of Electri cal Properties of Si-Microprobe Electrode Arrays for Neural Recording

N. Funagayama, T. Kawano, T. Harimoto, A. Ishihara, T. Kawashima, H. Takao, K. Sawada, S. Usui, M. Ishida 2005

[雑誌論文] Recording of single motor unit action potentials using Si microprobe electrode array chip-examination of electrode impedance-

T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, and M. Ishida 2005

[学会発表] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities

T. Kawano, A. Ishihara, T. Harimoto, H. Takao, K. Sawada, S. Usui, M. Ishida 2005

[雑誌論文] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method

Md. Shofiqul, Islam, H. Ishino, T. Kawano, H. Takao, K. Sawada, M. Ishida 2005