トップ›研究者を探す›集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

集積回路上への選択成長極微細シリコンプローブによるスマート・マイクロチップ

KAKEN 科学研究費助成事業データベース で見る
研究課題番号 KAKENHI-PROJECT-14205044
研究種目 基盤研究(A)
研究分野 工学
電気電子工学
電子・電気材料工学
研究機関 豊橋技術科学大学
代表研究者 石田 誠
研究分担者 澤田 和明
研究分担者 高尾 英邦
研究期間 開始年月日 2002/4/1
研究期間 終了年度 2004
研究ステータス 完了 (2004/4/1)
配分額（合計） 48,490,000 (直接経費 :37,300,000、間接経費 :11,190,000)
配分額（履歴） 2004年度：11,830,000 (直接経費 :9,100,000、間接経費 :2,730,000)
2003年度：14,430,000 (直接経費 :11,100,000、間接経費 :3,330,000)
2002年度：22,230,000 (直接経費 :17,100,000、間接経費 :5,130,000)
キーワード スマートチップ
微細針電極
単結晶シリコンプローブアレイ
VLS選択成長
細胞電位計測
網膜、脳科学
MOSFET on Si(111)
マイクロ・ナノテクノロジー
細胞電立計測
単結晶シリコンプローブレイ
網膜,脳科学
Smart chip
Microprobe electrode
Single crystalline silicon probe array
Vapor-liquid-solid growth
Analysis of neurons
Retina, neuroscience
MOSFET on Si(111)
Micro-Nano technology

研究成果

[雑誌論文] Siマイクロプローブ電極アレイチップを用いた細胞電位記録

河野剛士, 石原彰人, 針本哲宏, 高尾英邦, 澤田和明, 臼井支朗, 石田 誠 2005

[雑誌論文] 神経インターフェース技術へのSiマイクロプローブアレイチップの応用

川島貴弘, 河野剛士, 高尾英邦, 澤田和明, 金子秀和, 石田 誠 2005

[雑誌論文] 神経電位記録用イリジウム先端電極を有する低インピーダンスSiプローブ

篠田朝之介, 船ヶ山直樹, 川島貴弘, 河野剛士, 高尾英邦, 澤田和明, 石田 誠 2005

[雑誌論文] ICマイクロチップ上へのSiマイクロプローブ電極アレイ結晶成長と細胞電位測定応用

河野剛士, 高尾英邦, 澤田和明, 石田 誠 2004

[雑誌論文] Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system

Takeshi Kawano, Akito Ishihara, Tetsuhiro Harimoto, Hidekuni Takao, Kazuaki Sawada, Shiro Usui, Makoto Ishida 2004

[雑誌論文] Bio-Sensing Devices with Silicon Integrated Circuit Technology

Makoto Ishida, Kazuaki Sawada, Hidekuni Takao 2004

[雑誌論文] A Si nano-micro-wire array on a Si(111) substrate and field emission device applications

Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada 2004

[雑誌論文] Low-impedance Ir-tip Si Microprobe Array for Neural Recording

Asanosuke Shinoda, Naoki Funagayama, Takahiro Kawashima, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Three-dimensional multichannel Si microprobe electrode array chip for analysis of the nervous system

Takeshi Kawano, Akito Ishihara, Tetsuhiro Harimoto, Hidekuni Takao, Kazuaki Sawada, Shiro Usui, Makoto Ishida 2004

[雑誌論文] Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-chip MOSFETs on Si(111) Substrates

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] マルチチャンネルSiマイクロプローブ電極アレイチップ

石田 誠, 河野剛士, 高尾英邦, 澤田 和明 2004

[雑誌論文] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

Md Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid(VLS) Growth Method

Md Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

Md Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Improvement of electrical properties of Si microprobe electrode arrays for neural recording

Naoki Funagayama, Takeshi Kawano, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Application of Si microprobe array chips to the neural interface technology

Takahiro Kawashima, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Hidekazu Kaneko, Makoto Ishida 2004

[雑誌論文] Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-chip MOSFETs on Si(111) Substrates

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Neural Recording Chip with Penetrating Si Microprobe Electrode Array by Selective Vapor-Liquid-Solid Growth Method

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Signal Conditioning CMOS Circuits Integrated on Si(111) for Image-Recording Sensor of Neural Activity

Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Selective Vapor-Liquid-Solid Epitaxial Growth of Micro-Si Probe Electrode Arrays with On-chip MOSFETs on Si(111) Substrates

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Nano-Micro Si Wire Array on Si(111) IC Chips and Device Applications

Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada 2004

[雑誌論文] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Analysis of the Nervous System

Takeshi Kawano, Akito Ishihara, Tetsuhiro Harimoto, Hidekuni Takao, Kazuaki Sawada, Shiro Usui, Makoto Ishida 2004

[雑誌論文] Neural Recording Chip with Penetrating Si Microprobe Electrode Array by Selective Vapor-Liquid-Solid Growth Method

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Neural Recording Chip with Penetrating Si Microprobe Electrode Array by Selective Vapor-Liquid-Solid Growth Method

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Nano-Micro Si Wire Array on Si(111) IC Chips and Device Applications

Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada 2004

[雑誌論文] Package of Si microprobe array chip for recording light evoked retinal neurons

Takeshi Kawano, Hiroshi Ishino, Naoki Funagayama, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Signal Conditioning CMOS Circuits Integrated on Si(111) for Image-Recording Sensor of Neural Activity

Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2004

[雑誌論文] Electrical Characteristics of VLS-Si Microprobes on Smart Microchip for Neural Recording Experiment

Takeshi Kawano, Akito Ishihara, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Selectively Grown Si Micro-Probe Array Chip on Si(111) with Signal Processing Circuits

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Smart microchip for detecting cell potential using Si micro-probes selectively grown on IC chips

Makoto Ishida, Takeshi Kawano, Hdekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Nano-Micro Si wire array on Si(111) IC chips and Device Applications

Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] CMOS Signal Processing Circuits on Si(111) for Neural Activity Image-Recording with Epitaxially Grown Micro-Si Probes

Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Neural Recording Chip with Penetrating Si Microprobe Array and Application to record Response from Cell in Retina

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Selectively Grown Si Micro-Probe Array Chip on Si(111) with Signal Processing Circuits

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Fabrication of varying-length micro Si probe arrays for neural activity recording by vapor-liquid-solid growth method

Ryoji Tani, Takeshi Kawano, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] CMOS Signal Processing Circuits on Si(111) for Neural Activity Image-Recording with Epitaxially Grown Micro-Si Probes

Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Smart microchip for detecting cell potential using Si micro-probes selectively grown on IC chips

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Electrical Properties of n-channel MOSFETs for On-chip Circuits of Smart Neural Recording Sensor

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Smart Microchips for Intelligent Human Sensing

Makoto Ishida, Takeshi Kawano, Yoshiko Kato, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Multi-recording using Penetrating Si Microprobe Array Sensor

Makoto Ishida, Takeshi Kawano, Akito Ishihara, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Si Microprobe Array Growth after IC Process and Application to Neural Recoding Microchip

Takeshi Kawano, Yoshiko Kato, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Neuron Size Si Probe Array Fabricated on Integrated Circuits for Multichannel Electrode

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Fabrication of low resistance micro-Si probe using in-situ doping VLS growth for neural activity recording

Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Multichannel 5×5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Neuron Size Si Probe Array Fabricated on Integrated Circuits for Multichannel Electrode

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Multichannel 5 x 5-Site 3-Dimensional Si Micro-Probe Electrode Array for Neural Activity Recording

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Nano-Micro Si wire array on Si(111) IC chips and Device Applications

Makoto Ishida, Takeshi Kawano, Masato Futagawa, Yuji Arai, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Smart Microchips for Intelligent Human Sensing

Makoto Ishida, Takeshi Kawano, Yoshiko Kato, Hidekuni Takao, Kazuaki Sawada 2003

[雑誌論文] Si(111) CMOS Signal Detection Circuit for Integrated Micro Si Probe Chip

Yoshiko Kato, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2003

[雑誌論文] Mechanical and Electrical Properties of Micro-Si Probe Array for Multichannel neural Activity Recording Chip

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

[雑誌論文] Fabrication and evaluation of CMOS-IC on Si(111) for image-recording sensor of neural activity-effect of hydrogen annealing

Yoshiko Kato, Yoshiaki Ito, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Vapor-liquid-solid Graon Si Probe Array Chip for Penetrating and Recording in the Nervous System

Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Selectively Grown Si Micro-Prove Array Chip on Si(111) with Signal Processing Circuits

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

[雑誌論文] Fabrication and Properties of Ultra Small Si Wire Arrays with Circuits by Vapor-Liquid-Solid Growth

Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Fabrication of low resistance VLS micro-Si probe using Au-Sb alloy for neural activity recording

Hiroshi Ishino, Takeshi Kawano, Ryoji Tani, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Smart chip with selective micro-probes on Si(111) IC chips for detecting nerve potential

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

[雑誌論文] Multichannel 3D Si Micro-Probe Array on MOSFET Circuits to Record Response from Cell in Retina

Takeshi Kawano, Yoshiko Kato, Ryoji Tani, Hiroshi Ishino, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Smart chip with selective micro-probes on Si(111) IC chips for detecting nerve potential

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

[雑誌論文] Mechanical and Electrical Properties of Micro-Si Probe Array for Multichannel neural Activity Recording Chip

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

[雑誌論文] Signal Conditioning CMOS Circuit Integrated on Si(111) for Neural Activity Image Recording

Yoshiko Kato, Takeshi Kawano, Yoshiaki Ito, Mitsuaki Ashiki, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida 2002

[雑誌論文] Selectively Grown Si Micro-Prove Array Chip on Si(111) with Signal Processing Circuits

Makoto Ishida, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada 2002

半導体集積回路装置